Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

Sarubbi, F; Nanver, L.K.; Scholtes, T.L.M.; Nihtianova, S.; Scholze, F

Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

Conference paper (2008)

Authors

F Sarubbi Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

S. Nihtianova Electronic Instrumentation -

F Scholze External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2008

Language

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials