F Scholze | TU Delft Repository

FS

F Scholze

Conference paper (7)

Journal article (4)

Poster (1)

12 records found

1

Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Journal article (2014) - L.K. Nanver (author), L. Qi (author), F Scholze (author), V. Mohammadi (author), C. Mok Kai Rine (author), W.B. de Boer (author), N. Golshani (author), A. Sammak (author), T.L.M. Scholtes (author), Lukas M. Gottwald (author), U Kroth (author)

Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment

Journal article (2013) - L. Shi (author), S. Nihtianova (author), L.K. Nanver (author), F Scholze (author)

Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes

Journal article (2012) - L. Shi (author), S. Nihtianova (author), S. Xia (author), L.K. Nanver (author), Lukas M. Gottwald (author), F Scholze (author)

Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

Conference paper (2012) - L. Shi (author), S. Nihtianova (author), F Scholze (author), L.K. Nanver (author)

Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges

Journal article (2012) - L. Shi (author), S. Nihtianova (author), L Haspeslagh (author), F Scholze (author), Lukas M. Gottwald (author), L.K. Nanver (author)

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

Conference paper (2011) - L. Shi (author), S. Nihtianova (author), L.K. Nanver (author), F Scholze (author), Lukas M. Gottwald (author)

Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency

Conference paper (2011) - L. Shi (author), L.K. Nanver (author), C Laubis (author), F Scholze (author), S. Nihtianova (author)

high performance silicon based extreme ultraviolet radiation detector for industrial application

Conference paper (2009) - L. Shi (author), F Sarubbi (author), S. Nihtianova (author), L.K. Nanver (author), T.L.M. Scholtes (author), F Scholze (author)

Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes

Conference paper (2009) - L. Shi (author), F Sarubbi (author), S. Nihtianova (author), L.K. Nanver (author), F Scholze (author)

High-performance DUV/EUV photodiodes in a pure boron doping technology

Conference paper (2008) - F Sarubbi (author), L.K. Nanver (author), T.L.M. Scholtes (author), S. Nihtianova (author), F Scholze (author)

Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

Conference paper (2008) - F Sarubbi (author), L.K. Nanver (author), T.L.M. Scholtes (author), S. Nihtianova (author), F Scholze (author)

Characterization of new EUV stable silicon photodiodes

Poster (2008) - F Scholze (author), C Laubis (author), F Sarubbi (author), L.K. Nanver (author), S. Nihtianova (author)