JF Jongste | TU Delft Repository

JJ

JF Jongste

Conference paper (10)

Journal article (7)

Report (7)

24 records found

1

Deformation Mechanism in the Forcefill Process.

Journal article (2000) - G.C.A.M. Janssen (author), JF Jongste (author), A.H. Verbruggen (author)

Localized stress near and the thermal expansion of AI 2 Cu precipitates in an AI thin film matrix.

Journal article (2000) - JP Lokker (author), N.M. van der Pers (author), A.H. Verbruggen (author), G.C.A.M. Janssen (author), JF Jongste (author), S Radelaar (author)

Kinetcs of copper forcefill.

Conference paper (1999) - G.C.A.M. Janssen (author), JF Jongste (author), S Radelaar (author)

Influence of SiH2Cl2 on the kinetics of chemical vapor deposition of tungsten by SiH4 reduction of WF6.

Journal article (1999) - JF Jongste (author), TGM Oosterlaken (author), G.C.A.M. Janssen (author), S Radelaar (author)

Mechanism for forcefill.

Conference paper (1999) - G.C.A.M. Janssen (author), A.H. Verbruggen (author), JF Jongste (author), S Radelaar (author)

Aluminium via fill at elevated pressure and teperature

Conference paper (1998) - G.C.A.M. Janssen (author), JF Jongste (author), JP Lokker (author), A.H. Verbruggen (author), S Radelaar (author)

Report on kinetics of forcefill and relation between in-plane stress and forcefill capability

Report (1998) - JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)

High Pressure Filling of Sub-micron Aluminium Vias

Conference paper (1998) - JF Jongste (author), JP Lokker (author), G.C.A.M. Janssen (author), A.H. Verbruggen (author), S Radelaar (author)

The role of the TiN liner in forcefill.

Journal article (1998) - G.C.A.M. Janssen (author), JF Jongste (author), A.H. Verbruggen (author), S Radelaar (author)

Kinetics of Copper Forcefill.

Conference paper (1998) - G.C.A.M. Janssen (author), JF Jongste (author), S Radelaar (author), T.W. de Loos (author), T Kouno (author), T Ohba (author)

Report of cleaning of the water after contact to the pressurizing medium and Report on the integrity of reviously defined circuits to the prevalent temperature and pressure in liquid mediated forcefill

Report (1998) - JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)

Report on stress relaxation at constant temperatures in AlNiCr contiguous films and stacks of films

Report (1997) - JP Lokker (author), JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)

Stress in AlNiCr films and stacks of films

Conference paper (1997) - JP Lokker (author), JF Jongste (author), DJ de Boer (author), G.C.A.M. Janssen (author), S Radelaar (author)

Mechanical Reliability of CVD-Copper Thin Films

Journal article (1997) - JF Jongste (author), JP Lokker (author), G.C.A.M. Janssen (author), S Radelaar (author), J Torres (author), J Palleau (author)

High Pressure Aluminium Via-Fill for ULSI interconnect using a Liquid Transducer

Conference paper (1997) - JF Jongste (author), X. Li (author), JP Lokker (author), G.C.A.M. Janssen (author), S Radelaar (author), T.W. de Loos (author)

Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer

Journal article (1997) - E Sabouret (author), C Schaffnit (author), JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)

High Pressure Aluminium for Submicron Vias using a Liquid Transducer

Journal article (1997) - JF Jongste (author), X. Li (author), JP Lokker (author), G.C.A.M. Janssen (author), S Radelaar (author)

Copper for IC-applications. Mechanical reliability of CVD copper films

Report (1996) - JF Jongste (author), JP Lokker (author), G.C.A.M. Janssen (author), S Radelaar (author)

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996) - PFM Verhoeven (author), JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author), M Lerme (author), O Demolliens (author)

Electrical properties of WGex contacts on Ti adhesion layers

Conference paper (1996) - PFM Verhoeven (author), TGM Oosterflaken (author), JF Jongste (author), O Demolliens (author), G.C.A.M. Janssen (author), S Radelaar (author)