The role of the TiN liner in forcefill.

Janssen, G.C.A.M.; Jongste, JF; Verbruggen, A.H.; Radelaar, S

The role of the TiN liner in forcefill.

Journal article (1998)

Authors

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

JF Jongste External organisation

A.H. Verbruggen QN/Fysics of NanoElectronics

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

OLD Metals Processing, Microstructures and Properties

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Published Date

1998

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Research Group

OLD Metals Processing, Microstructures and Properties