In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the thermal time constant is 28 μs. As a result, we have control over the carbon precipitation time, thereby governing how many graphene layers are formed. Bi-layer to multi-layer graphene was observed using micro-Raman spectroscopy, but not single-layer graphene, as it gives no Raman signal when coupled on a nickel surface. The corresponding precipitation control theory is also presented in this paper, in which we relate the out-diffusion of carbon atoms from the grains of the nickel structure to the resulting number of graphene layers. Our method provides regulated carbon segregation from nickel and allows a prescribed number of graphene layers to form by tuning the precipitation time. In this way, we enable the direct in situ synthesis of graphene locally on the top and sidewalls of nickel MEMS structures, so that e.g. such graphene-coated MEMS surfaces can contribute towards a promising solution against friction and wear for MEMS devices with sliding components.

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Single-crystal copper films on sapphire have recently been reported upon in relation to graphene growth on these films. In the present paper the kinetics of the formation of single crystal copper films is investigated. We demonstrate the importance of heating the sapphire substrate in 1000 hPa oxygen, followed by a fast cooling prior to depositing the copper film. The importance of this treatment is tentatively explained by the dissolution of oxygen in sapphire and subsequent out-diffusion during recrystallization of the copper film to form a copper-oxide interface layer. Also, the importance of avoiding oxygen incorporation in the sputter deposited film is demonstrated.

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The wear of pipelines, used in slurry transport, results in high costs for maintenance and replacement. The wear mechanism involves abrasion, corrosion, impact, and the interaction among them. In this work, we study the effect of impact on the wear mechanism and wear rate. Results show that when the effect of impact is small, the wear mechanism is dominated by electrochemically induced surface modification, which leads to a lower wear rate in a corrosive environment than in a non-corrosive environment. By contrast, when the effect of impact is large, the wear mechanism is drastically altered. In that regime plastic deformation is important. The influence of corrosion in the high impact regime can be neglected. Our findings show the importance of including impact effect in the distinction of wear of slurry pipes@en

In this paper, we report on the influence of capillary condensation on the sliding friction of sidewall surfaces in polycrystalline silicon micro-electromechanical systems (MEMS). We developed a polycrystalline silicon MEMS tribometer, which is a microscale test device with two components subject to sliding contact. One of the components can be heated in situ by Joule heating to set the temperature of the contact and thereby control the capillary kinetics at the MEMS sidewalls. We used an optical displacement measurement technique to record the stick–slip motion of the slider with sub-nanometer resolution, and we assessed the friction force with nanonewton resolution. All friction measurements were performed under controlled ambient conditions while sweeping the contact temperature from room temperature to 300 C, and from 300 C to room temperature. We were able to distinguish the two ways in which energy is dissipated during sliding: the ‘semi-statically’ dissipated energy attributed to asperity deformation and contact yield, and the dynamically dissipated energy ascribed to the release of the tension in the slider during slip events. We observed an increase in the dynamically dissipated energy at 80 C while sweeping down in temperature. This increase is caused by higher adhesion due to capillary condensation between the conformal surfaces. Our study highlights how energy is dissipated during the sliding contact of MEMS sidewalls, and it is helpful in overcoming friction in multi-asperity systems. @en

Uniaxial materials whose axial and tangential permittivities have opposite signs are referred to as indefinite or hyperbolic media. While hyperbolic responses are normally achieved with metamaterials, hexagonal boron nitride (hBN) naturally possesses this property due to the anisotropic phonons in the mid-infrared. Using scattering-type scanning near-field optical microscopy, we studied polaritonic phenomena in hBN. We performed infrared nano-imaging of highly confined and low-loss hyperbolic phonon polaritons in hBN. The polariton wavelength was shown to be governed by the hBN thickness according to a linear law persisting down to few atomic layers [1]. Additionally, we carried out the modification of hyperbolic response in meta-structures comprised of a mononlayer graphene deposited on hBN [2]. Electrostatic gating of the top graphene layer allows for the modification of wavelength and intensity of hyperbolic phonon polaritons in bulk hBN. The physics of the modification originates from the plasmon-phonon coupling in the hyperbolic medium. Furthermore, we demonstrated the “hyperlens” for subdiffractional focusing and imaging using a slab of hBN [3]. References [1] S. Dai et al., Science, 343, 1125 (2014). [2] S. Dai et al., Nature Nanotechnology, 10, 682 (2015). [3] S. Dai et al., Nature Communications, 6, 6963 (2015).
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In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We were able to decrease adhesion from 500 nN to 200 nN with just one heated surface of which the temperature was set above 300 °C. The temperature should not be set too high: we observed increased adhesion due to a direct bonding process once the temperature was increased above 750 °C. Remarkably, adhesion increased by heating from room temperature to 75 °C, which is attributed to more water being transferred to the contact area due to faster kinetics. We observed the same effect in the cases where both surfaces were heated, although at slightly different temperatures. We demonstrated that heating only one surface to between 300 °C and 750 °C is sufficient to significantly lower adhesion, due to the removal of capillary menisci. The required heater is typically most easily implemented in a stationary part of the device.@en

In this paper, we report on the feasibility of depositing Ni-Ti, with Ni-rich composition, thin films at 450 degrees C on polyimide. The films were magnetron co-sputter deposited from Ni-Ti and Ti targets on to three different substrate types: a) polyimide (PI) foils, b) SiO2/Si and c) PI spin coated Si wafers. The crystal structure, surface morphology and microstructure were studied using X-ray diffraction, atomic force microscopy and transmission electron microscopy. A difference in thin film growth mode was observed depending on the substrate. Ni-Ti films deposited on polyimide foil did not show any phase transformation upon thermal cycling. Ni-Ti films deposited on polyimide spin coated wafers showed the expected phase transformation upon thermal cycling. (c) 2013 Elsevier B.V. All rights reserved.@en