DJ de Boer | TU Delft Repository

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DJ de Boer

Conference paper (1)

Journal article (2)

Report (3)

6 records found

1

Characteizatin of deposition rate and gap filling capability of a high density plasma deposition reactor

Journal article (1998) - DJ de Boer (author), G.C.A.M. Janssen (author), S Radelaar (author)

Trenchfill with SiOF, uniformity of properties of interest over the wafer

Report (1997) - DJ de Boer (author), AJ Kalkman (author), G.C.A.M. Janssen (author), S Radelaar (author)

SiOFx and SiO2 deposition in an ECR-HDP reactor: Tool characterisation and film analysis

Journal article (1997) - AJ Kalkman (author), DJ de Boer (author), H Fukuda (author), JBC van de Hilst (author), G.C.A.M. Janssen (author), S Radelaar (author)

Trenchfill with SiOF, electrical results

Report (1997) - AJ Kalkman (author), DJ de Boer (author), G.C.A.M. Janssen (author), S Radelaar (author)

Stress in AlNiCr films and stacks of films

Conference paper (1997) - JP Lokker (author), JF Jongste (author), DJ de Boer (author), G.C.A.M. Janssen (author), S Radelaar (author)

Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition

Report (1996) - JBC van de Hilst (author), DJ de Boer (author), G.C.A.M. Janssen (author), S Radelaar (author)