Trenchfill with SiOF, uniformity of properties of interest over the wafer

de Boer, DJ; Kalkman, AJ; Janssen, G.C.A.M.; Radelaar, S

Trenchfill with SiOF, uniformity of properties of interest over the wafer

Report (1997)

Authors

DJ de Boer External organisation

AJ Kalkman QN/Fysics of NanoElectronics

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

QN/Fysics of NanoElectronics

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Published Date

1997

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Research Group

QN/Fysics of NanoElectronics