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Jv
JBC van de Hilst
Academic Work (3)
Journal article (2)
Report (1)
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3 records found
1
SiOFx and SiO2 deposition in an ECR-HDP reactor: Tool characterisation and film analysis
Journal article (1997) -
AJ Kalkman (author)
,
DJ de Boer (author)
,
H Fukuda (author)
,
JBC van de Hilst (author)
,
G.C.A.M. Janssen (author)
,
S Radelaar (author)
High electric field transport in bismuth nanoconstrictions
Journal article (1996) -
JBC van de Hilst (author)
,
JA van Hulst (author)
,
NN Gribov (author)
,
J. Caro (author)
,
S Radelaar (author)
Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition
Report (1996) -
JBC van de Hilst (author)
,
DJ de Boer (author)
,
G.C.A.M. Janssen (author)
,
S Radelaar (author)