Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition

Report (1996)

Authors

JBC van de Hilst External organisation
DJ de Boer External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
Research Group
OLD Metals Processing, Microstructures and Properties
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Published Date

1996

Language

English

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Research Group

OLD Metals Processing, Microstructures and Properties