E Sabouret | TU Delft Repository

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E Sabouret

Conference paper (1)

Journal article (1)

Report (2)

4 records found

1

W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

Conference paper (1998) - C Schaffnit (author), E Sabouret (author), CA van de Jeugd (author), TGM Oosterflaken (author), G.C.A.M. Janssen (author), S Radelaar (author)

Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

Report (1997) - C Schaffnit (author), E Sabouret (author), CA van de Jeugd (author), TGM Oosterlaken (author), G.C.A.M. Janssen (author), S Radelaar (author)

Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer

Journal article (1997) - E Sabouret (author), C Schaffnit (author), JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret (author), PFM Verhoeven (author), JF Jongste (author), G.C.A.M. Janssen (author), S Radelaar (author)