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ES
E Sabouret
4 records found
1
Authored
W and WSi2 deposition by the reaction of poly-cristalline Si and WF6
Conference paper (1998) -
C Schaffnit
,
E Sabouret
,
CA van de Jeugd
,
TGM Oosterflaken
,
G.C.A.M. Janssen
,
S Radelaar
Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer
Journal article (1997) -
E Sabouret
,
C Schaffnit
,
JF Jongste
,
G.C.A.M. Janssen
,
S Radelaar
Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction
Report (1997) -
C Schaffnit
,
E Sabouret
,
CA van de Jeugd
,
TGM Oosterlaken
,
G.C.A.M. Janssen
,
S Radelaar
Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.
Report (1996) -
E Sabouret
,
PFM Verhoeven
,
JF Jongste
,
G.C.A.M. Janssen
,
S Radelaar