Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Sabouret, E; Verhoeven, PFM; Jongste, JF; Janssen, G.C.A.M.; Radelaar, S

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996)

Authors

E Sabouret External organisation

PFM Verhoeven External organisation

JF Jongste External organisation

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

OLD Metals Processing, Microstructures and Properties

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Published Date

1996

Language

English

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Research Group

OLD Metals Processing, Microstructures and Properties