PFM Verhoeven | TU Delft Repository

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PFM Verhoeven

Conference paper (1)

Report (2)

3 records found

1

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996) - PFM Verhoeven (author), JF Jongste (author), GCAM Janssen (author), G.C.A.M. Janssen (author), S Radelaar (author), M Lerme (author), O Demolliens (author)

Electrical properties of WGex contacts on Ti adhesion layers

Conference paper (1996) - PFM Verhoeven (author), TGM Oosterflaken (author), JF Jongste (author), O Demolliens (author), GCAM Janssen (author), G.C.A.M. Janssen (author), S Radelaar (author)

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret (author), PFM Verhoeven (author), JF Jongste (author), G.C.A.M. Janssen (author), GCAM Janssen (author), S Radelaar (author)