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PV

PFM Verhoeven

3 records found

1

Authored

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996) - PFM Verhoeven, JF Jongste, G.C.A.M. Janssen, S Radelaar, M Lerme, O Demolliens

Electrical properties of WGex contacts on Ti adhesion layers

Conference paper (1996) - PFM Verhoeven, TGM Oosterflaken, JF Jongste, O Demolliens, G.C.A.M. Janssen, S Radelaar

Report on etching of a stack consisting of an aluminum alloy, WGe barrier and Ti adhesion layer. Anisotropy, selectivity to oxide and quality of the adhesion.

Report (1996) - E Sabouret, PFM Verhoeven, JF Jongste, G.C.A.M. Janssen, S Radelaar