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Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4
Report (1996) -
PFM Verhoeven (author)
,
JF Jongste (author)
,
GCAM Janssen (author)
,
G.C.A.M. Janssen (author)
,
S Radelaar (author)
,
M Lerme (author)
,
O Demolliens (author)
