Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Verhoeven, PFM; Jongste, JF; Janssen, G.C.A.M.; Radelaar, S; Lerme, M; Demolliens, O

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996)

Authors

PFM Verhoeven External organisation

JF Jongste External organisation

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

S Radelaar OLD Metals Processing, Microstructures and Properties

M Lerme External organisation

O Demolliens External organisation

Research Group

OLD Metals Processing, Microstructures and Properties

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Published Date

1996

Language

English

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Research Group

OLD Metals Processing, Microstructures and Properties