Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996)

Authors

PFM Verhoeven External organisation
JF Jongste External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
M Lerme External organisation
O Demolliens External organisation
Research Group
OLD Metals Processing, Microstructures and Properties
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Published Date

1996

Language

English

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Research Group

OLD Metals Processing, Microstructures and Properties