Reactive Ion Etchin of metal stack consisting of an aluminium ally, WGe barrier and Ti adhesion layer

Journal article (1997)

Authors

E Sabouret External organisation

C Schaffnit External organisation

JF Jongste External organisation

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

OLD Metals Processing, Microstructures and Properties

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Published Date

1997

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Research Group

OLD Metals Processing, Microstructures and Properties