Aluminium Sub-micron Via-Fill using a high Pressure Liquid Transducer

Report (1996)

Authors

JF Jongste External organisation
X. Li External organisation
JP Lokker QN/Fysics of NanoElectronics
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
T.W. de Loos Old - sect Applied Thermodynamics & Phase Equilibria (DCT/TTF)
Research Group
QN/Fysics of NanoElectronics
More Info
expand_more

Published Date

1996

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Fysics of NanoElectronics