High Pressure Aluminium Via-Fill for ULSI interconnect using a Liquid Transducer

Conference paper (1997)

Authors

JF Jongste External organisation
X. Li External organisation
JP Lokker QN/Fysics of NanoElectronics
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
Theo W. de Loos Old - sect Applied Thermodynamics & Phase Equilibria (DCT/TTF)
Research Group
QN/Fysics of NanoElectronics
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Published Date

1997

Language

Undefined/Unknown

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Research Group

QN/Fysics of NanoElectronics