In the early 2030s, ESAs new X-ray observatory, Athena, is scheduled to be launched. It will carry two main
instruments, one of which is the X-ray Integral Field Unit (X-IFU), an X-ray imaging spectrometer, which will consist of an array of several thousand transition-edge sensors (TESs) with a proposed energy resolution of 2.5 eV for photon energies up to 7 keV. At SRON we develop the backup TES
array based on Ti/Au bilayers with a transition temperature just below 100 mK. In this contribution we will give a broad overview of the properties and capabilities of these state-of-the-art detectors. Over the years we have fabricated and studied a large number of detectors with various
geometries, providing us with a good understanding of how to precisely control the properties of our detectors. We are able to accurately vary the most important detector properties, such as the normal resistance, thermal conductance and critical temperature. This allows us to finely tune our
detectors to meet the demands of various applications. The detectors have demonstrated excellent energy resolutions of below 1.8 eV for 5.9 keV X-rays. By tuning the properties of the devices, they can be optimally matched to various read-out schemes using both AC and DC biasing. The next step is to increase the size of our TES arrays from our current kilo-pixel arrays towards the
full-sized array for X-IFU.
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We report measured T_c of superconducting Ti/Au bilayer strips with a width W varying from 5 to 50 µm. The strips were fabricated based on a Ti/Au bilayer that consists of a 41-nm-thick Ti layer to which a 280-nm-thick Au layer was added. We find that the T_c drops as W decreases and the declining trend almost perfectly follows T_c/ [mK] = - 738.4 [μ m] ²/ W²+ 91.0 , where T_c(W= ∞) of 91 mK is consistent with the intrinsic T_c of the bilayer. The result is interpreted as a consequence of the lateral inverse proximity effect originated in normal-metal microstructures, namely Au overhangs that exist at the edges of the Ti/Au bilayer. The T_c shift from the intrinsic T_c should be anticipated in addition to the longitudinal proximity effect from superconducting Nb leads when one designs Ti/Au TESs.

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Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm2 Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is Tc = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector's bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔEFWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector's noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.

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We have characterized and mapped the electrical cross talk (ECT) of a frequency division multiplexing (FDM) system with a transition edge sensor (TES) bolometer array, which is intended for space applications. By adding a small modulation at 120 Hz to the AC bias voltage of one bolometer and measuring the cross talk response in the current noise spectra of the others simultaneously, we have for the first time mapped the ECT level of 61 pixels with a nominal frequency spacing of 32 kHz in a 61 × 61 matrix and a carrier frequency ranging from 1 MHz to 4 MHz. We find that about 94% of the pixels show an ECT level of less than 0.4%. Only the adjacent pixels reach this level, and the ECT for the rest of the pixels is less than 0.1%. We also observe higher ECT levels, up to 10%, between some of the pixels, which have bundled long, parallel coplanar wires connecting TES bolometers to inductor-capacitor filters. In this case, the high mutual inductances dominate. To mitigate this source of ECT, the coplanar wires should be replaced by microstrip wires in the array. Our study suggests that an FDM system can have a relatively low ECT level, e.g., around 0.4% if the frequency spacing is 30 kHz. Our results successfully demonstrate a low electrical cross talk for a space FDM technology.

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We are developing large Transition Edge Sensor (TES) arrays in combination with a frequency domain multiplexing readout for the next generation of X-ray space observatories. For operation under an AC-bias, the TESs have to be carefully designed and optimized. In particular, the use of high aspect ratio devices will help us to mitigate non-ideal behavior due to the weak-link effect. In this paper, we present a full characterization of a TES array containing five different device geometries, with aspect ratios (width:length) ranging from 1:2 up to 1:6. The complex impedance of all geometries is measured in different bias configurations to study the evolution of the small-signal limit superconducting transition parameters α and β, as well as the excess noise. We show that high aspect ratio devices with properly tuned critical temperatures (around 90 mK) can achieve excellent energy resolution, with an array average of 2.03 ± 0.17 eV at 5.9 keV and a best achieved resolution of 1.63 ± 0.17 eV. This demonstrates that AC-biased TESs can achieve a very competitive performance compared to DC-biased TESs. The results have motivated a push to even more extreme device geometries currently in development.

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The next generation of Far-infrared and X-ray space observatories will require detector arrays with thousands of transition edge sensor (TES) pixel. It is extremely important to have a tool that is able to characterize all the pixels and that can give a clear picture of the performance of the devices. In particular, we refer to those aspects that can affect the global energy resolution of the array: logarithmic resistance sensitivity with respect to temperature and current (α and β parameters, respectively), uniformity of the TESs and the correct understanding of the detector thermal model. Complex impedance measurement of a TES is the only technique that can give all this information at once, but it has been established only for a single pixel under DC bias. We have developed a complex impedance measurement method for TESs that are AC biased since we are using a MHz frequency domain multiplexing (FDM) system to readout an array. The FDM readout demands for some modifications to the complex-impedance technique and extra considerations, e.g. how to modulate a small fraction of the bias carrier frequencies in order to get a proper excitation current through the TESs and how to perform an accurate demodulation and recombination of the output signals. Also, it requires careful calibration to remove the presence of parasitic impedances in the entire readout system. We perform a complete set of AC impedance measurements for different X-ray TES microcalorimeters based on superconducting TiAu bilayers with or without normal metal Au bar structures. We discuss the statistical analysis of the residual between impedance data and fitting model to determine the proper calorimeter thermal model for our detectors. Extracted parameters are used to improve our understanding of the differences and capabilities among the detectors and additionally the quality of the array. Moreover, we use the results to compare the calculated noise spectra with the measured data.

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Dilution and adiabatic demagnetization refrigerators based on pulse tube cryocoolers are nowadays used in many low temperature physics experiments, such as atomic force and scanning tunneling microscopy, quantum computing, radiation detectors, and many others. A pulse tube refrigerator greatly simplifies the laboratory activities being a cryogen-free system. The major disadvantage of a pulse tube cooler is the high level of mechanical vibrations at the warm and cold interfaces that could substantially affect the performance of very sensitive cryogenic instruments. In this paper, we describe the performance of a very simple mechanical attenuation system used to eliminate the pulse-tube-induced low frequency noise of the superconducting transition-edge sensors under development for the instruments of the next generation of infra-red and X-ray space observatories.

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SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

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SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm² and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10^-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10^-19 W/√Hz.

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