At SRON, we have been developing X-ray TES micro-calorimeters as backup technology for the X-ray Integral Field Unit (X-IFU) of the Athena mission, demonstrating excellent resolving powers both under DC and AC bias. We also developed a frequency-domain multiplexing (FDM) readout technology, where each TES is coupled to a superconducting band-pass LC resonator and AC biased at MHz frequencies through a common readout line. The TES signals are summed at the input of a superconducting quantum interference device (SQUID), which performs a first amplification at cryogenic stage. Custom analog front-end electronics and digital boards take care of further amplifying the signals at room temperature and of the modulation/demodulation of the TES signals and bias carrier, respectively. We report on the most recent developments on our FDM technology, which involves a two-channel demonstration with a total of 70 pixels with a summed energy resolution of 2.34 ± 0.02 eV at 5.9 keV without spectral performance degradation with respect to single-channel operation. Moreover, we discuss prospects towards the scaling-up to a larger multiplexing factor up to 78 pixels per channel in a 1–6 MHz readout bandwidth.@en

We report our most recent progress and demonstration of a frequency domain multiplexing (FDM) readout technology for transition-edge sensor (TES) arrays, both of which we have been developing in the framework of the X-IFU instrument on board the future Athena X-ray telescope. Using Ti/Au TES micro-calorimeters, high-Q LC filters and analog/digital electronics developed at SRON and low-noise two-stage SQUID amplifiers from VTT Finland, we demonstrated the feasibility of our FDM readout technology, with the simultaneous readout of 37 pixels with an energy resolution of 2.23 eV at an energy of 6 keV. We finally outline our plans for further scaling up and improving our technology in the future.

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Transition-edge sensors (TESs) are the selected technology for future spaceborne x-ray observatories, such as Athena, Lynx, and HUBS. These missions demand thousands of pixels to be operated simultaneously with high energy-resolving power. To reach these demanding requirements, every aspect of the TES design has to be optimized. Here we present the experimental results of tests on different devices where the coupling between the x-ray absorber and the TES is varied. In particular, we look at the effects of the diameter of the coupling stems and the distance between the stems and the TES bilayer. Based on measurements of the ac complex impedance and noise, we observe a reduction in the excess noise as the spacing between the absorber stem and the bilayer is decreased. We identify the origin of this excess noise to be internal thermal fluctuation noise between the absorber stem and the bilayer. In addition, we see an impact of the coupling on the superconducting transition in the appearance of kinks. Our observations show that these unwanted structures in the transition shape can be avoided with careful design of the coupling geometry. The stem diameter appears to have a significant effect on the smoothness of the TES transition. This observation is still poorly understood, but is of great importance for both ac and dc biased TESs.

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Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm2 Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is Tc = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector's bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔEFWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector's noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.

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We demonstrate multiplexing readout of 60 transition edge sensor (TES) bolometers operating at 90 mK using a frequency division multiplexing readout chain with bias frequencies ranging from 1 to 3.5 MHz and with a typical frequency spacing of 32 kHz. The readout chain starts with a two-stage SQUID amplifier and has a noise level of 9.5 pA/ Hz. We compare current-voltage curves and noise spectra of TESs measured in a single-pixel mode and in a multiplexing mode. We also map the noise equivalent power (NEP) and the saturation power of the bolometers in both modes, where there are 43 pixels that do not show more than 10% difference in NEP and 5% in saturation power when measured in single pixel and multiplex modes. We have read out a TES with an NEP of 0.45 aW/ Hz in the multiplexing-mode, which demonstrates the capability of reading out ultra-low noise TES bolometer arrays for space applications.

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Transition-edge sensors (TESs) are used as very sensitive thermometers in microcalorimeters aimed at detection of different wavelengths. In particular, for soft X-ray astrophysics, science goals require very high-resolution microcalorimeters which can be achieved with TESs coupled to suitable absorbers. For many applications, there is also need for a high number of pixels which typically requires multiplexing in the readout stage. Frequency-domain multiplexing (FDM) is a common scheme and is the baseline proposed for the ATHENA mission. FDM requires biasing the TES in AC at MHz frequencies. Recently, there has been reported degradation in performances under AC with respect to DC bias. In order to assess the performances of TESs to be used with FDM, it is thus of great interest to compare the performances of the same device both under AC bias and DC bias. This requires two different measurement set-ups with different processes for making the characterization. We report in this work the preliminary results of a single-pixel characterization performed on a TiAu TES under AC and afterwards under DC bias in different facilities. Extraction of dynamical parameters and noise performances are compared in both cases as a first stage for further AC/DC comparison of these devices.

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Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

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We are developing large Transition Edge Sensor (TES) arrays in combination with a frequency domain multiplexing readout for the next generation of X-ray space observatories. For operation under an AC-bias, the TESs have to be carefully designed and optimized. In particular, the use of high aspect ratio devices will help us to mitigate non-ideal behavior due to the weak-link effect. In this paper, we present a full characterization of a TES array containing five different device geometries, with aspect ratios (width:length) ranging from 1:2 up to 1:6. The complex impedance of all geometries is measured in different bias configurations to study the evolution of the small-signal limit superconducting transition parameters α and β, as well as the excess noise. We show that high aspect ratio devices with properly tuned critical temperatures (around 90 mK) can achieve excellent energy resolution, with an array average of 2.03 ± 0.17 eV at 5.9 keV and a best achieved resolution of 1.63 ± 0.17 eV. This demonstrates that AC-biased TESs can achieve a very competitive performance compared to DC-biased TESs. The results have motivated a push to even more extreme device geometries currently in development.

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The next generation of Far-infrared and X-ray space observatories will require detector arrays with thousands of transition edge sensor (TES) pixel. It is extremely important to have a tool that is able to characterize all the pixels and that can give a clear picture of the performance of the devices. In particular, we refer to those aspects that can affect the global energy resolution of the array: logarithmic resistance sensitivity with respect to temperature and current (α and β parameters, respectively), uniformity of the TESs and the correct understanding of the detector thermal model. Complex impedance measurement of a TES is the only technique that can give all this information at once, but it has been established only for a single pixel under DC bias. We have developed a complex impedance measurement method for TESs that are AC biased since we are using a MHz frequency domain multiplexing (FDM) system to readout an array. The FDM readout demands for some modifications to the complex-impedance technique and extra considerations, e.g. how to modulate a small fraction of the bias carrier frequencies in order to get a proper excitation current through the TESs and how to perform an accurate demodulation and recombination of the output signals. Also, it requires careful calibration to remove the presence of parasitic impedances in the entire readout system. We perform a complete set of AC impedance measurements for different X-ray TES microcalorimeters based on superconducting TiAu bilayers with or without normal metal Au bar structures. We discuss the statistical analysis of the residual between impedance data and fitting model to determine the proper calorimeter thermal model for our detectors. Extracted parameters are used to improve our understanding of the differences and capabilities among the detectors and additionally the quality of the array. Moreover, we use the results to compare the calculated noise spectra with the measured data.

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Frequency-division multiplexing is the baseline read-out system for large arrays of superconducting transition-edge sensors (TES’s) under development for the X-ray and infrared instruments like X-IFU (Athena) and SAFARI, respectively. In this multiplexing scheme, the sensors are ac-biased at different frequencies from 1 to 5 MHz and operate as amplitude modulators. Weak superconductivity is responsible for the complex TES resistive transition, experimentally explored in great detail so far, both with dc- and ac-biased read-out schemes. In this paper, we will review the current status of our understanding of the physics of the TES’s and their interaction with the ac bias circuit. In particular, we will compare the behaviour of the TES nonlinear impedance, across the superconducting transition, for several detector families, namely: high-normal-resistance TiAu TES bolometers, low-normal-resistance MoAu TES microcalorimeters and high-normal-resistance TiAu TES microcalorimeters.

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SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

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Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10^{- 19} W/Hz^{1 / 2} have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

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