Frequency-division multiplexing is the baseline read-out system for large arrays of superconducting transition-edge sensors (TES’s) under development for the X-ray and infrared instruments like X-IFU (Athena) and SAFARI, respectively. In this multiplexing scheme, the sensors are ac-biased at different frequencies from 1 to 5 MHz and operate as amplitude modulators. Weak superconductivity is responsible for the complex TES resistive transition, experimentally explored in great detail so far, both with dc- and ac-biased read-out schemes. In this paper, we will review the current status of our understanding of the physics of the TES’s and their interaction with the ac bias circuit. In particular, we will compare the behaviour of the TES nonlinear impedance, across the superconducting transition, for several detector families, namely: high-normal-resistance TiAu TES bolometers, low-normal-resistance MoAu TES microcalorimeters and high-normal-resistance TiAu TES microcalorimeters.

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm² and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10^-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10^-19 W/√Hz.