Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

Conference paper (2016)

Authors

Pourya Khosropanah SRON–Netherlands Institute for Space Research
T. Suzuki Nagoya University
M.L. Ridder SRON–Netherlands Institute for Space Research
R. A. Hijmering SRON–Netherlands Institute for Space Research
H. Akamatsu SRON–Netherlands Institute for Space Research
L Gottardi SRON–Netherlands Institute for Space Research
J. Van Der Kuur SRON–Netherlands Institute for Space Research
J.R. Gao SRON–Netherlands Institute for Space Research, QN/Gao Lab
B. D. Jackson SRON–Netherlands Institute for Space Research
Research Group
QN/Gao Lab
Copyright: © 2016 P Khosropanah, T. Suzuki, M. L. Ridder, R. A. Hijmering, H. Akamatsu, L Gottardi, J. Van Der Kuur, J.R. Gao, B. D. Jackson
DOI: https://doi.org/10.1117/12.2233472
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Published Date

2016

Language

English

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Research Group

QN/Gao Lab

Abstract

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.

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