At SRON, we have been developing X-ray TES micro-calorimeters as backup technology for the X-ray Integral Field Unit (X-IFU) of the Athena mission, demonstrating excellent resolving powers both under DC and AC bias. We also developed a frequency-domain multiplexing (FDM) readout technology, where each TES is coupled to a superconducting band-pass LC resonator and AC biased at MHz frequencies through a common readout line. The TES signals are summed at the input of a superconducting quantum interference device (SQUID), which performs a first amplification at cryogenic stage. Custom analog front-end electronics and digital boards take care of further amplifying the signals at room temperature and of the modulation/demodulation of the TES signals and bias carrier, respectively. We report on the most recent developments on our FDM technology, which involves a two-channel demonstration with a total of 70 pixels with a summed energy resolution of 2.34 ± 0.02 eV at 5.9 keV without spectral performance degradation with respect to single-channel operation. Moreover, we discuss prospects towards the scaling-up to a larger multiplexing factor up to 78 pixels per channel in a 1–6 MHz readout bandwidth.@en

We report on the x-ray background rate measured with transition-edge sensors (TES) micro-calorimeters under frequency-domain multiplexing (FDM) readout as a possible technology for future experiments aiming at a direct detection of axion-like particles. Future axion helioscopes will make use of large magnets to convert axions into photons in the keV range and x-ray detectors to observe them. To achieve this, a detector array with high spectral performance and extremely low background is necessary. TES are single-photon, non-dispersive, high-resolution micro-calorimeters and represent a possible candidate for this application. We have been developing x-ray TES micro-calorimeters and an FDM readout technology in the framework of the space-borne x-ray astronomical observatories. We show that the current generation of our detectors is already a promising technology for a possible axion search experiment, having measured an x-ray background rate of 2.2(2) × 10⁻⁴ cm⁻² s⁻¹ keV⁻¹ with a cryogenic demonstrator not optimized for this specific application. We then make a prospect to further improve the background rate down to the required value ( < 1 0 − 7 cm⁻² s⁻¹ keV⁻¹) for an axion-search experiment, identifying no fundamental limits to reach such a level.

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We present a characterization of the sensitivity of TES X-ray micro-calorimeters to environmental conditions under frequency-domain multiplexing (FDM) readout. In the FDM scheme, each TES in a readout chain is in series with a LC band-pass filter and AC biased with an independent carrier at MHz range. Using TES arrays, cold readout circuitry and warm electronics fabricated at SRON and SQUIDs produced at VTT Finland, we characterize the sensitivity of the detectors to bias voltage, bath temperature and magnetic field. We compare our results with the requirements for the Athena X-IFU instrument, showing the compliance of the measured sensitivities. We find in particular that FDM is intrinsically insensitive to the magnetic fieldbecause of TES design and AC readout.@en

In the early 2030s, ESAs new X-ray observatory, Athena, is scheduled to be launched. It will carry two main
instruments, one of which is the X-ray Integral Field Unit (X-IFU), an X-ray imaging spectrometer, which will consist of an array of several thousand transition-edge sensors (TESs) with a proposed energy resolution of 2.5 eV for photon energies up to 7 keV. At SRON we develop the backup TES
array based on Ti/Au bilayers with a transition temperature just below 100 mK. In this contribution we will give a broad overview of the properties and capabilities of these state-of-the-art detectors. Over the years we have fabricated and studied a large number of detectors with various
geometries, providing us with a good understanding of how to precisely control the properties of our detectors. We are able to accurately vary the most important detector properties, such as the normal resistance, thermal conductance and critical temperature. This allows us to finely tune our
detectors to meet the demands of various applications. The detectors have demonstrated excellent energy resolutions of below 1.8 eV for 5.9 keV X-rays. By tuning the properties of the devices, they can be optimally matched to various read-out schemes using both AC and DC biasing. The next step is to increase the size of our TES arrays from our current kilo-pixel arrays towards the
full-sized array for X-IFU.
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Large arrays of transition edge sensors (TESs) are the baseline for a number of future space observatories. For instance, the X-ray integral field unit (X-IFU) instrument on board the ATHENA space telescope will consist of ∼ 3000 TESs with high energy resolution (2eV at X-ray energies up to 7 keV). In this contribution we report on the development of an X-ray TES array as a backup detector technology for X-IFU. The baseline readout technology for this mission is time domain multiplexing where the detectors are DC biased. Specifically, we report on the characterization of four different Ti/Au TESs with the following dimensions (L × W): 30 × 15 , 30 × 30 , 50 × 25 and 50×50μm2, all of which are coupled to a 2.3μm thick Au absorber of area 240×240μm2. We have performed our characterization using our standard frequency domain multiplexing readout connecting only pixels at low frequencies, where nonlinear effects due to the AC biasing are negligible. Promising energy resolution has been obtained, for instance 1.78±0.10eV and 1.75±0.10eV at 5.9 keV for the 50 × 25 and 50×50μm2 detectors respectively. Uniformity over a kilo-pixel array (of detectors with the same geometry) has been also studied, confirming the high quality of our fabrication process.

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Transition-edge-sensor (TES) microcalorimeters and bolometers are used for a variety of applications.The sensors are based on the steep temperature-dependent resistance of the normal-to-superconducting transition, and are thus intrinsically sensitive to magnetic fields. Conventionally the detectors are shielded from stray magnetic fields using external magnetic shields. However, in particular for applications with strict limits on the available space and mass of an instrument, external magnetic shields might not be enough to obtain the required shielding factors or field homogeneity. Additionally, these shields are only effective for magnetic fields generated external to the TES array, and are ineffective to mitigate the impact of internally generated magnetic fields. Here we present an alternative shielding method based on a super-conducting groundplane deposited directly on the backside of the silicon nitride membrane on which the TESs are located. We demonstrate that this local shielding for external magnetic fields has a shielding factor of at the least approximately 80, and is also effective at reducing internal self-induced magnetic fields, as demonstrated by measurements and simulation of the eddy current losses in our ac-biased detectors. Measurements of 5.9-keV x-ray photons show that our shielded detectors have a high resilience to external magnetic fields, showing no degradation of the energy resolution or shifts of the energy-scale calibration for fields of several microtesla, values higher than expected in typical real-world applications.@en

We report measured T_c of superconducting Ti/Au bilayer strips with a width W varying from 5 to 50 µm. The strips were fabricated based on a Ti/Au bilayer that consists of a 41-nm-thick Ti layer to which a 280-nm-thick Au layer was added. We find that the T_c drops as W decreases and the declining trend almost perfectly follows T_c/ [mK] = - 738.4 [μ m] ²/ W²+ 91.0 , where T_c(W= ∞) of 91 mK is consistent with the intrinsic T_c of the bilayer. The result is interpreted as a consequence of the lateral inverse proximity effect originated in normal-metal microstructures, namely Au overhangs that exist at the edges of the Ti/Au bilayer. The T_c shift from the intrinsic T_c should be anticipated in addition to the longitudinal proximity effect from superconducting Nb leads when one designs Ti/Au TESs.

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Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm2 Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is Tc = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector's bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔEFWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector's noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.

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Transition-edge sensors (TESs) are the selected technology for future spaceborne x-ray observatories, such as Athena, Lynx, and HUBS. These missions demand thousands of pixels to be operated simultaneously with high energy-resolving power. To reach these demanding requirements, every aspect of the TES design has to be optimized. Here we present the experimental results of tests on different devices where the coupling between the x-ray absorber and the TES is varied. In particular, we look at the effects of the diameter of the coupling stems and the distance between the stems and the TES bilayer. Based on measurements of the ac complex impedance and noise, we observe a reduction in the excess noise as the spacing between the absorber stem and the bilayer is decreased. We identify the origin of this excess noise to be internal thermal fluctuation noise between the absorber stem and the bilayer. In addition, we see an impact of the coupling on the superconducting transition in the appearance of kinks. Our observations show that these unwanted structures in the transition shape can be avoided with careful design of the coupling geometry. The stem diameter appears to have a significant effect on the smoothness of the TES transition. This observation is still poorly understood, but is of great importance for both ac and dc biased TESs.

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We are developing a kilo-pixels Ti/Au TES array as a backup option for Athena X-IFU. Here we report on single-pixel performance of a 32 × 32 array operated in a Frequency Division Multiplexing (FDM) readout system, with bias frequencies in the range 1-5 MHz. We have tested the pixels response at several photon energies, by means of a 55Fe radioactive source (emitting Mn-Kα at 5.9 keV) and a Modulated X-ray Source (MXS, providing Cr-Kα at 5.4 keV and Cu-Kα at 8.0 keV). First, we report the procedure used to perform the detector energy scale calibration, usually achieving a calibration accuracy better than ∼0.5 eV in the 5.4-8.9 keV energy range. Then, we present the measured energy resolution at the different energies (best single pixel performance: ΔEFWHM = 2.40 ± 0.09 eV @ 5.4 keV; 2.53 ± 0.10 eV @ 5.9 keV; 2.78 ± 0.16 eV @ 8.0 keV), investigating also the performance dependency from the pixel bias frequency and the count rate. Thanks to long background measurements (∼1 d), we finally detected also the Al-Kα line at 1.5 keV, generated by fluorescence inside the experimental setup. We analyzed this line to obtain a first assessment of the single-pixel performance also at low energy (ΔEFWHM = 1.91 eV ± 0.21 eV @ 1.5 keV), and to evaluate the linearity of the detector response in a large energy band (1.5-8.9 keV).

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Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of Δ E < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with (length × width) 140 × 30 μ m2 TiAu TESs, which have a 2.3 μ m thick Au absorber for X-ray photons. The pixels have a typical normal resistance Rn = 121 m Ω and a critical temperature Tc ∼ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instrument's energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1;× 10-3 when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV).

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Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

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Hot Universe Baryon Surveyor (HUBS), a Chinese space mission, is proposed to find a large fraction of the so-called missing baryons, which would help us to understand more about the structure formation and evolution of the universe. Both theoretical and experimental results show that developing a highly efficient soft X-ray spectrometer over a large field of view and with a high energy resolution is the key to detect the “missing baryons”. X-ray microcalorimeters based on a transition-edge sensor (TES) array is required for HUBS, which aims to have 1 deg² field of view (FoV) with 1' angular resolution and 2 eV energy resolution optimized around 0.6 keV. Taking the high throughput X-ray optical focusing system on HUBS into account, the TES array is designed to have 60 x 60 pixels with an area of 1 mm² for each pixel. The microcalorimeter consists of a TES, a weak thermal link to a heat bath, and a semi-metal or normal metal absorber to increase the X-ray absorption efficiency. When an X-ray photon with a given energy is absorbed, the temperature of the absorber increase, that can be monitored by measuring the resistance change of the TES. A bilayer of a superconductor and a normal metal is used to fabricate a TES with a critical temperature (Tc) of ~100 mK. The latter is set for the required energy resolution. For HUBS, both MoCu and TiAu TES technologies are considered in its development phase. Here we will focus on TiAu TES calorimeters designed and partially fabricated at SRON for HUBS. Recent demonstration of a resolution of 2.5 eV at 5.9 keV in an AC readout at SRON for X-IFU on board of Athena illustrates the promising of this technology. However, the challenging for the HUBS array is the large pixel size. We will report the design and fabrication of prototype HUBS calorimeters.

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Transition-edge sensors (TESs) are used as very sensitive thermometers in microcalorimeters aimed at detection of different wavelengths. In particular, for soft X-ray astrophysics, science goals require very high-resolution microcalorimeters which can be achieved with TESs coupled to suitable absorbers. For many applications, there is also need for a high number of pixels which typically requires multiplexing in the readout stage. Frequency-domain multiplexing (FDM) is a common scheme and is the baseline proposed for the ATHENA mission. FDM requires biasing the TES in AC at MHz frequencies. Recently, there has been reported degradation in performances under AC with respect to DC bias. In order to assess the performances of TESs to be used with FDM, it is thus of great interest to compare the performances of the same device both under AC bias and DC bias. This requires two different measurement set-ups with different processes for making the characterization. We report in this work the preliminary results of a single-pixel characterization performed on a TiAu TES under AC and afterwards under DC bias in different facilities. Extraction of dynamical parameters and noise performances are compared in both cases as a first stage for further AC/DC comparison of these devices.

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We are developing large Transition Edge Sensor (TES) arrays in combination with a frequency domain multiplexing readout for the next generation of X-ray space observatories. For operation under an AC-bias, the TESs have to be carefully designed and optimized. In particular, the use of high aspect ratio devices will help us to mitigate non-ideal behavior due to the weak-link effect. In this paper, we present a full characterization of a TES array containing five different device geometries, with aspect ratios (width:length) ranging from 1:2 up to 1:6. The complex impedance of all geometries is measured in different bias configurations to study the evolution of the small-signal limit superconducting transition parameters α and β, as well as the excess noise. We show that high aspect ratio devices with properly tuned critical temperatures (around 90 mK) can achieve excellent energy resolution, with an array average of 2.03 ± 0.17 eV at 5.9 keV and a best achieved resolution of 1.63 ± 0.17 eV. This demonstrates that AC-biased TESs can achieve a very competitive performance compared to DC-biased TESs. The results have motivated a push to even more extreme device geometries currently in development.

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The next generation of Far-infrared and X-ray space observatories will require detector arrays with thousands of transition edge sensor (TES) pixel. It is extremely important to have a tool that is able to characterize all the pixels and that can give a clear picture of the performance of the devices. In particular, we refer to those aspects that can affect the global energy resolution of the array: logarithmic resistance sensitivity with respect to temperature and current (α and β parameters, respectively), uniformity of the TESs and the correct understanding of the detector thermal model. Complex impedance measurement of a TES is the only technique that can give all this information at once, but it has been established only for a single pixel under DC bias. We have developed a complex impedance measurement method for TESs that are AC biased since we are using a MHz frequency domain multiplexing (FDM) system to readout an array. The FDM readout demands for some modifications to the complex-impedance technique and extra considerations, e.g. how to modulate a small fraction of the bias carrier frequencies in order to get a proper excitation current through the TESs and how to perform an accurate demodulation and recombination of the output signals. Also, it requires careful calibration to remove the presence of parasitic impedances in the entire readout system. We perform a complete set of AC impedance measurements for different X-ray TES microcalorimeters based on superconducting TiAu bilayers with or without normal metal Au bar structures. We discuss the statistical analysis of the residual between impedance data and fitting model to determine the proper calorimeter thermal model for our detectors. Extracted parameters are used to improve our understanding of the differences and capabilities among the detectors and additionally the quality of the array. Moreover, we use the results to compare the calculated noise spectra with the measured data.

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We are developing X-ray microcalorimeters as a backup option for the baseline detectors in the X-IFU instrument on board the ATHENA space mission led by ESA and to be launched in the early 2030s. 5 × 5 mixed arrays with TiAu transition-edge sensor (TES), which have different high aspect ratios and thus high resistances, have been designed and fabricated to meet the energy resolution requirement of the X-IFU instrument. Such arrays can also be used to optimize the performance of the frequency domain multiplexing (FDM) readout and lead to the final steps for the fabrication of a large detector array. In this work, we present the experimental results from tens of the devices with an aspect ratio (length-to-width) ranging from 1-to-1 up to 6-to-1, measured in a single-pixel mode with a FDM readout system developed at SRON/VTT. We observed a nominal energy resolution of about 2.5 eV at 5.9 keV at bias frequencies ranging from 1 to 5 MHz. These detectors are proving to be the best TES microcalorimeters ever reported in Europe, intending to meet the requirements of the X-IFU instrument, but also those of other future challenging X-ray space missions, fundamental physics experiments, plasma characterization and material analysis.

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We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm² TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

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SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

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