NB Koster | TU Delft Repository

NK

NB Koster

Abstract (1)

Conference paper (1)

Journal article (3)

5 records found

1

Parallel scanning probe microscope comes of age

Abstract (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), W.E. Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014) - RW Herfst (author), W Klop (author), M Eschen (author), TC van den Dool (author), NB Koster (author), H. Sadeghian Marnani (author)

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), W.E. Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author), E Louis (author), J Friedrich (author), NB Koster (author), LA Smaenok (author), F Bijkerk (author), T Zijlstra (author), LEM de Groot (author), E.W.J.M. van der Drift (author), BAC Rousseeuw (author), J Romijn (author)

Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics

Journal article (1996) - F Bijkerk (author), LA Shmaenol (author), T Zijlstra (author), E Louis (author), HJ Voorma (author), NB Koster (author), FA van Goor (author), J van Spijker (author), E.W.J.M. van der Drift (author), J Romijn (author), BAC Rousseeuw (author)