NB Koster | TU Delft Repository

NK

NB Koster

Abstract (1)

Conference paper (1)

Journal article (3)

5 records found

1

Parallel scanning probe microscope comes of age

Abstract (2014) - Hamed Sadeghian Marnani (author) , TC van den Dool (author) , WE Crowcombe (author) , RW Herfst (author) , J Winters (author) , GFIJ Kramer (author) , NB Koster (author)

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014) - RW Herfst (author) , W Klop (author) , M Eschen (author) , TC van den Dool (author) , NB Koster (author) , H Sadeghian Marnani (author)

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014) - Hamed Sadeghian Marnani (author) , TC van den Dool (author) , WE Crowcombe (author) , RW Herfst (author) , J Winters (author) , GFIJ Kramer (author) , NB Koster (author)

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author) , E Louis (author) , J Friedrich (author) , NB Koster (author) , LA Smaenok (author) , F Bijkerk (author) , T Zijlstra (author) , LEM de Groot (author) , EWJM van der Drift (author) , BAC Rousseeuw (author) , J Romijn (author)

Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics

Journal article (1996) - F Bijkerk (author) , LA Shmaenol (author) , T Zijlstra (author) , E Louis (author) , HJ Voorma (author) , NB Koster (author) , FA van Goor (author) , J van Spijker (author) , E.W.J.M. van der Drift (author) , J Romijn (author) , BAC Rousseeuw (author)