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JF
J Friedrich
Academic Work (1)
Journal article (1)
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Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers
Journal article (1997) -
HJ Voorma (author)
,
E Louis (author)
,
J Friedrich (author)
,
NB Koster (author)
,
LA Smaenok (author)
,
F Bijkerk (author)
,
T Zijlstra (author)
,
LEM de Groot (author)
,
E.W.J.M. van der Drift (author)
,
BAC Rousseeuw (author)
,
J Romijn (author)