HJ Voorma | TU Delft Repository

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HJ Voorma

Doctoral thesis (1)

Journal article (2)

3 records found

1

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author), E Louis (author), J Friedrich (author), NB Koster (author), LA Smaenok (author), F Bijkerk (author), T Zijlstra (author), LEM de Groot (author), E.W.J.M. van der Drift (author), BAC Rousseeuw (author), J Romijn (author)

Mo/Si multilayer optics for micro-lithography

Doctoral thesis (1997) - HJ Voorma (author)

Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics

Journal article (1996) - F Bijkerk (author), LA Shmaenol (author), T Zijlstra (author), E Louis (author), HJ Voorma (author), NB Koster (author), FA van Goor (author), J van Spijker (author), E.W.J.M. van der Drift (author), J Romijn (author), BAC Rousseeuw (author)