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LA Shmaenol
Academic Work (2)
Journal article (2)
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1
Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics
Journal article (1996) -
F Bijkerk (author)
,
LA Shmaenol (author)
,
T Zijlstra (author)
,
E Louis (author)
,
HJ Voorma (author)
,
NB Koster (author)
,
FA van Goor (author)
,
J van Spijker (author)
,
E.W.J.M. van der Drift (author)
,
J Romijn (author)
,
BAC Rousseeuw (author)