Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Herfst, RW; Klop, W; Eschen, M; van den Dool, TC; Koster, NB; Sadeghian Marnani, H

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014)

Authors

RW Herfst External organisation

W Klop External organisation

M Eschen External organisation

TC van den Dool External organisation

NB Koster External organisation

H Sadeghian Marnani Computational Design and Mechanics

Research Group

Computational Design and Mechanics

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Published Date

2014

Language

English

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Research Group

Computational Design and Mechanics

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