Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014)

Authors

RW Herfst External organisation
W Klop External organisation
M Eschen External organisation
TC van den Dool External organisation
NB Koster External organisation
H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics