HS
H. Sadeghian Marnani
48 records found
1
Authored
Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the sti
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Thin metal films are widely used in modern electro mechanical systems. The need for more integrated functionality and minimization of material and energy consumption leads to miniaturization of these systems. As a consequence, materials are processed on the micro- and nanometer s
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Using molecular dynamics calculations with a recently developed modified embedded atom method (MEAM) potential, the overall elastic behavior of silicon (100) nanobeams under externally applied strain at room temperature is investigated. As uniaxial tensile strain increases, the s
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Measuring frequency shift of a resonator to obtain information on mass and force is common in the fields of micro-electromechanical systems (MEMS). Typically on a cantilever structure, the method uses the spring-mass equation of the cantilever, together with the measured frequenc
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In this paper, the size-dependence of the elastic behavior of silicon nanofilms terminated by (100) surfaces is studied by means of molecular dynamics with the modified embedded atom method (MEAM).@en
In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molec
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Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the c
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Previous experimental and theoretical investigations have reported that the mechanical properties of silicon nanocantilevers, in particular the effective Young's Modulus, deviate from their bulk properties. This size-dependence has been attributed to surface effects. However, dif
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In this paper the temperature effect on [110] Silicon cantilevers is analyzed and measured in the range of 25 - 100°C. The quasi-static electrostatic pull-in instability method developed recently for ultra-thin cantilevers ["Characterizing Size-dependent Effective Elastic Modulus
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This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods u
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The elastic behavior of silicon nanocantilevers and nanowires, and specifically the effective Young's modulus has been shown by previous experimental measurements and theoretical investigations to be size-dependent.@en
Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mas
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This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbate molecules bound to the upper and lower surface on the resonance frequency has been st
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A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact
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This paper reports on the pull-in behavior of nonlinear microelectromechanical coupled systems. The generalized differential quadrature method has been used as a high-order approximation to discretize the governing nonlinear integro-differential equation, yielding more accurate r
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