High speed atomic force microscopy for wafer inspection

Keyvani Janbahan, A.; Sadeghian Marnani, H.; Tamer, M.S.; Goosen, J.F.L.; van Keulen, A.

High speed atomic force microscopy for wafer inspection

Abstract (2014)

Authors

A. Keyvani Janbahan Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

M.S. Tamer Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

Research Group

Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)

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More Info

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Published Date

2014

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics