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ME
M Eschen
Academic Work (1)
Journal article (1)
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Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems
Journal article (2014) -
RW Herfst (author)
,
W Klop (author)
,
M Eschen (author)
,
TC van den Dool (author)
,
NB Koster (author)
,
H. Sadeghian Marnani (author)
