Helium-ion-beam-induced growth of 3-dimensional AFM probes

Nanda, G.; Veldhoven, E van; Maas, D; Herfst, R.; Sadeghian Marnani, H.; Alkemade, P.F.A.

Helium-ion-beam-induced growth of 3-dimensional AFM probes

Abstract (2016)

Authors

G. Nanda QN/Kavli Nanolab Delft - , Kavli institute of nanoscience Delft

E van Veldhoven TNO

D Maas TNO

R. Herfst TNO

H. Sadeghian Marnani TNO, Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

P.F.A. Alkemade QN/Kavli Nanolab Delft - , Kavli institute of nanoscience Delft

Research Group

QN/Kavli Nanolab Delft () (TU Delft)

Metrology 3D-AFM Ion beam induced deposition Helium ion microscope

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http://resolver.tudelft.nl/uuid:f43d1657-5202-46ff-b829-9c7d8a756f9e

More Info

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Published Date

2016

Language

English

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft

Files

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