GFIJ Kramer | TU Delft Repository

GK

GFIJ Kramer

Abstract (1)

Conference paper (2)

3 records found

1

Parallel scanning probe microscope comes of age

Abstract (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), WE Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)

High-throughput parallel SPM for metrology, defect, and mask inspection

Conference paper (2014) - H. Sadeghian Marnani (author), RW Herfst (author), TC van den Dool (author), WE Crowcombe (author), J Winters (author), GFIJ Kramer (author)

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), WE Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)