Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

Fusion of local maps in mobile ad-hoc networks

Capative sensor integrated in silicon cavity for microfluidic jet systems

Fabrication of vertical electrodes on channel sidewall for picoliter liquid measurement

A micro-electromechanical education module - Part I: thermal actuators

A micro-electromatical education module - part II: electrostatic comb drives

Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems

Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers