T
T Chu Duc
33 records found
1
A powerful and effective design of a polymeric thermal microactuator is presented. The design has SU-8 epoxy layers filled and bonded in a meandering silicon (Si) microstructure. The silicon microstructure reinforces the SU-8 layers by lateral restraint. It also improves the tran
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This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56
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This paper presents simulation and measurement results characterizing a novel design of an electro-thermally actuated micro-gripper for micro-particles manipulation. The gripper structure consists of a comb-like, high aspect ratio silicon frame with an integrated aluminum heater
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