Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion

Conference paper (2007)

Authors

J. Wei Electronic Components, Technology and Materials - EEMCS
T Chu Duc Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials