2D Electro-Thermal Microgrippers with Large Clamping and Rotation Motion at Low Driving Voltage

Conference paper (2007)

Authors

T Chu Duc Electronic Components, Technology and Materials - EEMCS
GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J. Wei Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 µm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160 degrees Centigrade.