Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

Conference paper (2007)

Authors

Jia Wei Electronic Components, Technology and Materials
T Chu Duc Electronic Components, Technology and Materials
M van der Velden Mechatronic Systems Design
P. M. Sarro Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2007

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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