Piezoresistive cantilever beam for force sensing in two dimension

Journal article (2007)

Authors

T Chu Duc Electronic Components, Technology and Materials -

J.F. Creemer Old - EWI Sect. ECTM

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:2034451f-f362-433e-b2d1-0248b774159f

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials