Capative sensor integrated in silicon cavity for microfluidic jet systems

Conference paper (2007)

Authors

M van der Velden Mechatronic Systems Design
Jo Spronck Mechatronic Systems Design
RH Munnig Schmidt Mechatronic Systems Design
Research Group
Mechatronic Systems Design
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Published Date

2007

Language

Undefined/Unknown

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Research Group

Mechatronic Systems Design

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