4 records found
1
Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture
Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring