A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

Wei, J.; Yue, C; Chen, ZL; Liu, ZW; Sarro, Pasqualina M

A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

Journal article (2010)

Authors

J. Wei Electronic Components, Technology and Materials -

C Yue External organisation

ZL Chen External organisation

ZW Liu External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:8cc71f38-ef95-4b31-930f-5a8c14e7e732

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials