ZL Chen | TU Delft Repository

ZC

ZL Chen

Conference paper (2)

Journal article (1)

3 records found

1

A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

Journal article (2010) - Jia Wei (author), J. Wei (author), J Wei (author), C Yue (author), ZL Chen (author), ZW Liu (author), P.M. Sarro (author), PM Sarro (author), P. M. Sarro (author), Pasqualina M Sarro (author), Pasqualina Maria Sarro (author), Lina Sarro (author), Pasqualina M. Sarro (author)

Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

Conference paper (2009) - C Yue (author), Jia Wei (author), J. Wei (author), J Wei (author), ZL Chen (author), ZW Liu (author), P.M. Sarro (author), PM Sarro (author), P. M. Sarro (author), Pasqualina M Sarro (author), Pasqualina Maria Sarro (author), Lina Sarro (author), Pasqualina M. Sarro (author)

Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring

Conference paper (2009) - Jia Wei (author), J Wei (author), J. Wei (author), C Yue (author), ZL Chen (author), ZW Liu (author), Kofi A. A. Makinwa (author), K.A.A Makinwa (author), Kofi A.A. Makinwa (author), K. A.A. Makinwa (author), Kofi AA Makinwa (author), K. Makinwa (author), KAA Makinwa (author), K.A.A. Makinwa (author), Kofi Makinwa (author), K. A. A. Makinwa (author), Pasqualina M Sarro (author), P. M. Sarro (author), Pasqualina Maria Sarro (author), P.M. Sarro (author), Pasqualina M. Sarro (author), Lina Sarro (author), PM Sarro (author)