Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

Yue, C; Wei, J.; Chen, ZL; Liu, ZW; Sarro, Pasqualina M

Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

Conference paper (2009)

Authors

C Yue External organisation

J. Wei Electronic Components, Technology and Materials -

ZL Chen External organisation

ZW Liu External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials