Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Venstra, W.J.; van der Velden, M; Spronck, J.W.; van Eijk, J.

Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Conference paper (2006)

Authors

W.J. Venstra Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

M van der Velden Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2006

Language

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design