A micro-electromatical education module - part II: electrostatic comb drives

Paalvast, SL; van der Velden, M; Spronck, J.W.; Munnig Schmidt, R.H.

A micro-electromatical education module - part II: electrostatic comb drives

Conference paper (2007)

Authors

SL Paalvast Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

M van der Velden Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design