Recent research focusing on wide-bandgap and two-dimensional materials with a Schottky junction has provided a new concept for ultraviolet photodetectors. However, the working mechanism of the Schottky junction-based detector varies depending on the photosensitive materials used and the device structure. We demonstrated a TiO₂/AlGaN/GaN heterostructure-based photodetector with a Schottky junction, integrating an ultraviolet photosensitive TiO₂ nanolayer, a two-dimensional electron gas (2DEG) field effect transistor, and a metal-semiconductor Schottky diode. The spectral response wavelength region of the detector is 200-365 nm and the peak responsivity is 37.396 A W⁻¹ at −5 V bias under 240 nm UV illumination, respectively. Meanwhile, a peak photo-to-dark current ratio (PDCR) of 5.1 × 10² at −2 V bias voltage was observed under 274 nm UV irradiation. This Schottky-based 2DEG heterostructure detector can realize three dominant working principles: (i) the Schottky emission mechanism at a low reverse voltage (0-1 V) before the current is fully turned on, (ii) the Poole-Frenkel emission mechanism at a medium reverse voltage (−1 to −2 V) with peak PDCR, and (iii) the Fowler-Nordheim tunneling mechanism at a high reverse voltage (>−2 V) with a high responsivity. Continuous cycle response measurement results indicate that the detectors have good response repeatability and reliability. The characteristics of response wavelength, responsivity, and stability show that the detector can be used for several commercial applications, including sunscreen UV monitoring and LED sterilization light source detection.

@en

Based on our proposed precision two-step gate recess technique, a suspended gate-recessed Pt/AlGaN/GaN heterostructure gas sensor integrated with a micro-heater is fabricated and characterized. The controllable two-step gate recess etching method, which includes O2 plasma oxidation of nitride and wet etching, improves gas sensing performance. The sensitivity and current change of the AlGaN/GaN heterostructure to 1-200 ppm NO2/air are increased up to about 20 and 12 times compared to conventional gate device, respectively. The response time is also reduced to only about 25 % of value for conventional device. The sensor has a suspended circular membrane structure and an integrated micro-hotplate for adjusting the optimum working temperature. The sensitivity (response time) increases from 0.75 % (1250 s) to 3.5 % (75 s) toward 40 ppm NO2/air when temperature increase from 60°C to 300°C. The repeatability and cross-sensitivity of the sensor are also demonstrated. These results support the practicability of a high accuracy and fast response gas sensor based on the suspended gate recessed AlGaN/GaN heterostructure with an integrated micro-heater.

@en

A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied static and dynamic pressures at various temperatures ranging from 25 °C to 100 °C. The current change of the AlGaN/GaN heterostructure increased as the vacuum and temperature increases due to the increase of 2DEG density by tensile strain. The dynamic current change from 96 kPa down to 10 Pa of AlGaN/GaN heterostructure pressure sensor was 18.75 % at 100 °C. The maximum sensitivity reached 22.8 %/kPa with a power consumption of 1.8 µW. These results suggest that suspended AlGaN/GaN heterostructures are promising for high vacuum and high-temperature sensing applications.@en

The microelectronics industry, next to the powerful, continuously scaling of integrated circuits, is currently evolving in the diversification of integrated functions, generally referred to as more than Moore (MtM). MtM concerns all technologies enabling microsystems to be elevated to a higher integration level, and with small package size, lower power consumption and lower cost. Microelectromechanical (MEMS) are crucial within this development. While Si has proven to be the primary contestant in the MEMS sensor market, there is a growing need for sensors operating at conditions beyond the limits of Si. Si-based micro-sensors cannot operate in harsh environments such as high temperature, high radiation, high pressure, and chemically corrosive conditions. Wide bandgap semiconductors such as Gallium Nitride (GaN) are potential candidates to replace silicon due to their specific characteristics and proven performance in the power or LED applications. The research objective of this thesis is to develop a MEMS sensor platform utilizing GaN-based materials. The design, fabrication, packaging, and measurement of pressure, deep UV photodetector, and gas sensors are presented and discussed.@en

A high responsivity and controllable recovery ultraviolet (UV) photodetector based on a tungsten oxide (WO₃) gate AlGaN/GaN heterostructure with an integrated micro-heater is reported for the first time. The WO₃nanolayer was deposited by physical vapor deposition (PVD) for deep UV absorption and the micro-heater was integrated for chip level heating and cooling. Our device when exposed to UV wavelength exhibits a high responsivity of 1.67 × 10⁴A W⁻¹at 240 nm and a sharp cut-off wavelength of 275 nm. More importantly, the persistent photoconductivity (PPC) effect can be eliminated by a novel method, mono-pulse heating reset (MHR), which consists in applying an appropriate pulse voltage to the micro-heater right after the removal of the UV illumination. The recovery time was reduced from hours to just seconds without reducing the high responsivity and stability of the photodetector. The UV detection, high responsivity, high stability, controllable recovery process and low production cost of GaN-based photodetectors make these devices extremely attractive for several applications, such as fire detection and missile and rocket warning.

@en

We developed an AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO₃) nano-film modified gate for nitrogen dioxide (NO₂) detection. The device has a suspended circular membrane structure and an integrated micro-heater. The thermal characteristic of the Platinum (Pt) micro-heater and the HEMT self-heating are studied and modeled. A significant detection is observed for exposure to a low concentration of 100 ppb NO₂ /N₂ at ∼300 °C. For a 1 ppm NO₂ gas, a high sensitivity of 1.1% with a response (recovery) time of 88 second (132 second) is obtained. The effects of relative humidity and temperature on the gas sensor response properties in air are also studied. Based on the excellent sensing performance and inherent advantages of low power consumption, the investigated sensor provides a viable alternative high performance NO₂ sensing applications. It is suitable for continuous environmental monitoring system or high temperature applications.

@en

A suspended WO₃-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 ℃. The measured spectral response of WO₃-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater.

@en

High performance mixed potential type NO₂ sensors using porous yttria-stabilized zirconia (YSZ) layers doped with different concentration graphite as solid electrolyte and LaFeO₃ as sensing electrode were fabricated and characterized. LaFeO₃ was prepared by a typical citrate sol–gel method and characterized using XRD. The surface morphology and porosity of porous YSZ layers were characterized by field emission scanning electron microscope (FESEM). The sensor doped with 3 wt% graphite shows the highest response (−76.4 mV to 80 ppm NO₂) and the response is linearly dependent on the logarithm of NO₂ concentration in the range of 10–200 ppm. The sensor measurement results also present good repeatability and cross-sensitivity.

@en

This paper demonstrates a method to reduce the decay time in AlGaN/GaN photodetectors by a pulsed heating mode. A suspended AlGaN/GaN heterostructure photodetector integrated with a micro-heater is fabricated and characterized under ultraviolet illumination. We have observed that the course of persistent photoconductivity was effectively accelerated by applying pulsed heating. The decay time is significantly reduced from 175 s by DC heating to 116 s by 50 Hz pulsed heating at the same power (280 mW). With the same pulse duty cycle and a 50 Hz pulsed heating frequency, a reduction of 30%-45% in decay time is measured compared to DC heating.

@en

Mixed potential type ethanol gas sensor using Yttria-Stabilized Zirconia(YSZ)as solid electrolyte and LaFeO₃ as sensitive material was fabricated and characterized. LaFeO₃ was prepared by a sol-gel method and characterized by XRD.YSZ substrate and sensitive electrode were characterized using field emission scanning electron microscope. The measurement results show that the presented sensor exhibits a high sensitivity(135 mV to 400×10^-6 ethanol)and fast response time(14 s to 50×10^-6 ethanol)at 350 ℃. The results also demonstrate good repeatability and selectivity of the fabricated sensor.

@en

A suspended AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO 3 ) nanofilm modified gate was microfabricated and characterized for ppm-level acetone gas detection. The sensor featured a suspended circular membrane structure and an integrated microheater to select the optimum working temperature. High working temperature (300°C) increased the sensitivity to up to 25.7% and drain current change I DS to 0.31 mA for 1000-ppm acetone in dry air. The transient characteristics of the sensor exhibited stable operation and good repeatability at different temperatures. For 1000-ppm acetone concentration, the measured response and recovery times reduced from 148 and 656 to 48 and 320 s as the temperature increased from 210 °C to 300 °C. The sensitivity to 1000-ppm acetone gas was significantly greater than the sensitivity to ethanol, ammonia, and CO gases, showing low cross-sensitivity. These results demonstrate a promising step toward the realization of an acetone sensor based on the suspended AlGaN/GaN HEMTs.@en

Purpose: The purpose of this paper is to demonstrate a novel 3D system-in-package (SiP) approach. This new packaging approach is based on stacked silicon submount technology. As demonstrators, a smart lighting module and a sensor systems were successfully developed by using the fabrication and assembly process described in this paper. Design/methodology/approach: The stacked module consists of multiple layers of silicon submounts which can be designed and fabricated in parallel. The 3D stacking design offers higher silicon efficiency and miniaturized package form factor. This platform consists of silicon submount design and fabrication, module packaging, system assembling and testing and analyzing. Findings: In this paper, a smart light emitting diode system and sensor system will be described based on stacked silicon submount and 3D SiP technology. The integrated smart lighting module meets the optical requirements of general lighting applications. The developed SiP design is also implemented into the miniaturization of particular matter sensors and gas sensor detection system. Originality/value: SiP has great potential of integrating multiple components into a single compact package, which has potential implementation in intelligent applications.

@en