Q

Q Li

12 records found

The majority of offshore wind turbines are founded on large-diameter, open-ended steel monopiles. Monopiles must resist lateral loads and overturning moments because of environmental (wind and wave) actions, whereas vertical loads tend to be comparatively small. Recent developmen ...
In this paper, we present a novel MEMS Pirani sensor with triple heat sinks which was designed to measure the pressure inside thin film, wafer level packages. The sensors are made in SOI (silicon on insulator) wafers leading to a very simple fabrication process. The use of relati ...
In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The ...
In this paper, outgassing of the thin film vacuum package is analyzed by integrated MEMS (Microelectromechanical system) resonator and RBS (Rutherford backscattering spectroscopy). Outgassing behavior of different thin film packaging materials is studied by exodiffusion experimen ...
In this paper, we will present a novel MEMS Pirani sensor with triple heat sinks. The sensors are made on SOI (Silicon On Insulator) wafers leading to a very simple process and good mechanical structures as compared to alternative surface micromachining processes. Moreover, the p ...
Failure analysis (FA) is a critical element in Integrated Circuit (IC) manufacturing. As IC advances and new materials are introduced in the semiconductor process, some conventional FA techniques cannot be applied. In this paper, we present a novel FA technique for IC packages wi ...