Gas ambient dependence of quality factor in MEMS resonators

Conference paper (2009)

Authors

Q Li Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
JTM van Beek External organisation
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2009

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external low pressure.