Failure analysis of a thin-film nitride MEMS package

Journal article (2008)

Authors

Q Li Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Hans Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
JTM van Beek External organisation
F. Van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
KL Phan External organisation
Guoqi Zhang Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics