AJEM Janssen | TU Delft Repository

AJ

AJEM Janssen

Book chapter (2)

Conference paper (3)

Journal article (19)

Poster (4)

28 records found

1

Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer-Zernike theory

Journal article (2009) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), O.T.A. Janssen (author), Silvania Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), SF Pereira (author), S. F. Pereira (author)

Vectorial Aerial-image computations of three-dimensional objects based on the Extended Nijboer-Zernike Theory

Journal article (2009) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), O.T.A. Janssen (author), Silvania Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), SF Pereira (author), S. F. Pereira (author)

Assessment of optical systems by means of point-spread functions.

Book chapter (2008) - J.J.M. Braat (author), JJM Braat (author), S. van Haver (author), S van Haver (author), AJEM Janssen (author), P. Dirksen (author)

Image simulations of extended objects using an algorithm based on the Extended Nijboer Zernike (ENZ) formalism

Poster (2008) - S. van Haver (author), S van Haver (author), O.T.A. Janssen (author), AJEM Janssen (author), J.J.M. Braat (author), JJM Braat (author), Silvania Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), SF Pereira (author), S. F. Pereira (author)

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Journal article (2008) - AJEM Janssen (author), S. van Haver (author), S van Haver (author), P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author)

General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

Journal article (2008) - S van Haver (author), S. van Haver (author), O.T.A. Janssen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), H. P. Paul Urbach (author), Hendrik Paul Paul Urbach (author), H. Paul Urbach (author), Paul Paul Urbach (author), H. P. Urbach (author), Paul Urbach (author), P. Urbach (author), H.P. Paul Urbach (author), HP Urbach (author), Hendrik Paul Urbach (author), H. Paul Urbach (author), H. Urbach (author), H.P. Urbach (author), P. Paul Urbach (author), HP Paul Urbach (author), H. Paul Paul Urbach (author), S.F. Pereira (author), Silvania Pereira (author), S. F. Pereira (author), SF Pereira (author), Silvania F. Pereira (author)

Evaluation of scaled and annular pupils within the framework od the extended Nijboer-Zernike (ENZ) formalism.

Poster (2008) - S van Haver (author), S. van Haver (author), JJM Braat (author), J.J.M. Braat (author), Silvania Pereira (author), S. F. Pereira (author), S.F. Pereira (author), Silvania F. Pereira (author), SF Pereira (author), AJEM Janssen (author)

Characterization of a novel mask imaging algorithm based on the Extended Nijboer-Zernike (ENZ) formalism.

Poster (2008) - S. van Haver (author), S van Haver (author), O.T.A. Janssen (author), AJEM Janssen (author), J.J.M. Braat (author), JJM Braat (author), Silvania F. Pereira (author), S.F. Pereira (author), Silvania Pereira (author), SF Pereira (author), S. F. Pereira (author), P Evanschitzky (author)

Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Journal article (2008) - O.T.A. Janssen (author), S van Haver (author), S. van Haver (author), AJEM Janssen (author), J.J.M. Braat (author), JJM Braat (author), H. P. Paul Urbach (author), Hendrik Paul Paul Urbach (author), H. Paul Urbach (author), Paul Paul Urbach (author), H. P. Urbach (author), Paul Urbach (author), P. Urbach (author), H.P. Paul Urbach (author), HP Urbach (author), Hendrik Paul Urbach (author), H. Paul Urbach (author), H. Urbach (author), H.P. Urbach (author), P. Paul Urbach (author), HP Paul Urbach (author), H. Paul Paul Urbach (author), S.F. Pereira (author), Silvania Pereira (author), S. F. Pereira (author), SF Pereira (author), Silvania F. Pereira (author)

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Journal article (2008) - RM Aarts (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), S van Haver (author), S. van Haver (author), F. van Heesch (author), AJEM Janssen (author)

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper (2007) - S. van Haver (author), S van Haver (author), AJEM Janssen (author), P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author)

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article (2007) - AJEM Janssen (author), S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author)

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article (2007) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article (2006) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

High-NA lens characterization by through-focus intensity measurement

Conference paper (2006) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author), JJM Braat (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), T Matsuyama (author), T Noda (author)

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author)

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article (2005) - C van der Avoort (author), JJM Braat (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.

Poster (2005) - J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author), AS van de Nes (author)

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article (2005) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), A Leeuwenstein (author)